FloTron - economy multi-channel Reactive Gas, Process Control and Plasma Monitoring System

FloTron, Economy Multi-channel Process Control and Plasma Monitoring (PEM) System

Download a PDF copy of a FloTron™ brochure here

5 KEY FLOTRON™ ADVANTAGES

  • Applications: Reactive Magnetron Sputtering, Vacuum Arc, EB evaporation, IBS, PECVD & PEALD processes
  • High accuracy and excellent long-term process stability and process-to-process (batch-to-batch) reproducibility
  • A cost effective and easy to integrate solution
  • Dramatic process improvements: higher deposition rate (e.g. 2-3 times), thin film properties (e.g. n, k), reduced arcing and number of micro & macro defects
  • NEW Advanced software features, e.g. enhanced ‘Dual Sensor’ mode, process set-up automation, etc.

10 KEY FLOTRON™ FEATURES

  • 3, 5 and 9 (multi-signal) Actuator ports on standard FloTron™ systems
  • Single wavelength ‘PMT+filter’ type Optical Inputs (OIs)
  • Multiple OIs for multi-zone process control on cathodes up to 4.0 m long
  • Intelligent sensor technology for HIPIMS plasma monitoring and reactive gas control
  • NEW 0-5V, 0-10V analog voltage and (optional) 4-20 mA current inputs
  • NEW 3 control algorithms: PID & PDF for closed-loop control and EPD for end-point detection
  • NEW Built-in automated sensor and process calibration procedures
  • NEW 0-5V, 0-10V analog voltage outputs for high speed data acquisition (DAQ) of sensor signals or analysis by high frequency instrumentation (e.g. oscilloscope)
  • PROFIBUS & PROFINET optional industrial communication interfaces
  • FREE JAVA based FloTron™ Graphical User Interface and a smart FloTron™ Archive UI application for off-line review and organisation of logged process data

Specifications

FloTron 3 5 9
Output ports 3 5 9
(each provides power (+/- 15V or 24V), analog, digital and communication interfaces)
Input ports
Analog inputs (BNC): 0-5 or 0-10 VDC; [optional] 4-20 mA DC 4 4 2-4
Optical inputs (SMA 905): PMT + filter up to 1 up to 3 up to 5
Optical inputs: spectral range and resolution 200-900 nm / 10 nm
Remote control and status indication: digital inputs/outputs (TTL) 3 5 9
Control algorithms 3 proprietary: PID, PDF, EPD.
External power requirement Power supply included. Input voltage: 90 – 264 VAC. Input frequency: 47 to 63 Hz.
GUI compatibility Windows 7 or 8. Requires Java Runtime Environment 8 (JRE 8).
GUI computer requirements [min] CPU:Dual-Core i3, 3GHz, RAM:4GB, OS:32 or 64 bit Windows 7 or later, VGA adapter: any.
[optimal] CPU:Quad-Core i7, 3.5GHz, RAM:16GB, OS:64 bit Windows 7 or later. VGA adapter: GeForce 8 and 100 series or higher
Monitor resolution requirements [min] 1280 x 1080 px [recommended] 1920 x 1080 px
Communication interfaces [standard] Ethernet [optional] PROFIBUS, PROFINET or another industrial.
Housing Compact, rugged Al enclosure with enhanced protection from shock & vibration.
Dimensions 7.1" x 5.7" (180 mm x 145 mm)
Length 6” to 12” (153 mm to 305 mm), depending on configuration.
Weight 2 - 5 kg, depending on configuration.