FloTron™ H (Hybrid)

FloTron™ H (Hybrid), Multi-channel Process Control and combined Broadband and single-wavelength Plasma Monitoring

KEY FLOTRON™ H ADVANTAGES

  • One compact unit brings
    • Voltage control
    • ‘Single-wavelength’ UV-VIS-nIR plasma OES, process monitoring and control
    • Spectrometer-based UV-VIS-nIR plasma OES, process monitoring and control
  • Perfect for applications where monitoring and/or control of multiple locations, processes or plasma emissions are important
    • e.g. use Voltage Control for reactive SiO2 sputtering process, single-wavelength OES for Nb2O5 sputtering process and CCD spectrometer OES for reactive ITO sputtering process, all in one system.
  • Applications: Reactive Magnetron Sputtering, Vacuum Arc, EB evaporation, IBS, PECVD & PEALD processes
  • Perfect for R&D, pilot production and 24/7 mass production; high accuracy, excellent long-term process stability and reproducibility
  • A cost effective and easy to integrate solution providing dramatic process improvements
  • NEW Advanced software features, such as Dual Sensor mode, externally synchronized sensor data output, simultaneous multi-spectra acquisition and display, etc.

KEY FLOTRON™ H FEATURES

  • 3, 5 and 9 (multi-signal) Actuator ports on standard FloTron™ systems
  • UV-VIS-nIR CCD spectrometer type and single wavelength ‘PMT+filter’ type Optical Inputs (OIs)Multiple OIs for multiple process monitoring and control
  • HIPIMS plasma monitoring and reactive HIPIMS process control
  • NEW 0-5V, 0-10V analog voltage and (optional) 4-20 mA current inputs
  • NEW 3 control algorithms: PID & PDF for closed-loop control and EPD for end-point detection
  • NEW Built-in automated sensor and process calibration procedures
  • NEW 0-5V, 0-10V analog voltage outputs for high speed data acquisition (DAQ) of sensor signals or analysis by high frequency instrumentation (e.g. oscilloscope)
  • PROFIBUS & PROFINET optional industrial communication interfaces
  • FREE JAVA based FloTron™ Graphical User Interface and a smart FloTron™ Archive UI application for off-line review and organisation of logged process data

IMPORTANT SPECIFICATIONS

FloTron H359
Output ports359
(each provides power (+/- 15V or 24V), analog, digital and communication interfaces)
Analog inputs (BNC): 0-5 or 0-10 VDC; [optional] 4-20 mA DC442-4
Optical inputs (SMA 905): PMT + filterup to 1up to 3up to 5
PMT spectral range and resolution190 - (850)1040 nm / 1-6 nm
Optical inputs (SMA 905): UV-VIS-nIR spectrometerup to 11-3(or bespoke)1-3(or bespoke)
Spectrometer spectral range and resolution200-900 nm / 10 nm
Remote control and status indication: digital inputs/outputs (TTL)359
Control algorithms3 proprietary: PID, PDF, EPD.
External power requirementPower supply included. Input voltage: 90 – 264 VAC. Input frequency: 47 to 63 Hz.
GUI compatibilityWindows 7 or 8. Requires Java Runtime Environment 8 (JRE 8).
GUI computer requirements[min] CPU:Dual-Core i3, 3GHz, RAM:4GB, OS:32 or 64 bit Windows 7 or later, VGA adapter: any.
[optimal] CPU:Quad-Core i7, 3.5GHz, RAM:16GB, OS:64 bit Windows 7 or later. VGA adapter: GeForce 8 and 100 series or higher.
Monitor resolution requirements[min] 1280 x 1080 px [recommended] 1920 x 1080 px
Communication interfaces[standard] Ethernet [optional] PROFIBUS, PROFINET or another industrial.
HousingCompact, rugged Al enclosure with enhanced protection from shock & vibration.
Dimensions7.1" x 5.7" (180 mm x 145 mm).
Length6” to 12” (153 mm to 305 mm), depending on configuration.
Weight2 - 5 kg, depending on configuration.