FloTron PEM / OES optical assemblies for use in PAPVD and PECVD/ALD

FloTron PEM / OES optical assemblies for use in PAPVD and PECVD/ALD

Optical assemblies are accessories to FloTron™ systems that are required when implementing Plasma Emission Monitoring (PEM) and/or Optical Emission Spectrometry (OES) in PAPVD and PECVD/ALD systems. Standard 250°C, high, up to 800°C temperature designs.