FloTron X - Multi-channel Reactive Gas, Process Control and Plasma Monitoring System

FloTron X, Multi-channel Process Control and Broadband Plasma Monitoring (PEM) System

Download a PDF copy of a FloTron™ X brochure here

KEY FLOTRON™ X ADVANTAGES

  • Advanced UV-VIS-nIR plasma OES (PEM) and process control in one compact unit
  • Perfect for monitoring and/or control where multiple plasma emissions are important
    • e.g. monitoring/control of two reactive gases (O2 and N2, O2 and CF4, etc.)
    • e.g. control co-sputtering of dissimilar materials
  • Applications: Reactive Magnetron Sputtering, Vacuum Arc, EB evaporation, IBS, PECVD & PEALD processes
  • Perfect for R&D, pilot production and 24/7 mass production; high accuracy, excellent long-term process stability and reproducibility
  • A cost effective and easy to integrate solution providing dramatic process improvements
  • NEW Advanced software features, such as Dual Sensor mode, externally synchronized sensor data output, simultaneous multi-spectra acquisition and display, etc

10 KEY FLOTRON™ X FEATURES

  • 3, 5 and 9 (multi-signal) Actuator ports on standard FloTron™ systems
  • UV-VIS-nIR CCD spectrometer type Optical Inputs (OIs)
  • Multiple OIs for multi-zone process control on cathodes up to 4.0 m long
  • HIPIMS plasma monitoring and reactive HIPIMS process control
  • NEW 0-5V, 0-10V analog voltage and (optional) 4-20 mA current inputs
  • NEW 3 control algorithms: PID & PDF for closed-loop control and EPD for end-point detection
  • NEW Built-in automated sensor and process calibration procedures
  • NEW 0-5V, 0-10V analog voltage outputs for high speed data acquisition (DAQ) of sensor signals or analysis by high frequency instrumentation (e.g. oscilloscope)
  • PROFIBUS & PROFINET optional industrial communication interfaces
  • FREE JAVA based FloTron™ Graphical User Interface and a smart FloTron™ Archive UI application for off-line review and organisation of logged process data

Specifications

FloTron X359
Output ports359
(each provides power (+/- 15V or 24V), analog, digital and communication interfaces)
Analog inputs (BNC): 0-5 or 0-10 VDC; [optional] 4-20 mA DC 442-4
Optical inputs (SMA 905): UV-VIS-nIR spectrometer11-3(or bespoke)1-3(or bespoke)
Optical inputs: spectral range and resolution190 - (850)1040 nm / 1-6 nm
Remote control and status indication: digital inputs/outputs (TTL)359
Control algorithms3 proprietary: PID, PDF, EPD.
External power requirementPower supply included. Input voltage: 90 – 264 VAC. Input frequency: 47 to 63 Hz.
GUI compatibilityWindows 7 or 8. Requires Java Runtime Environment 8 (JRE 8).
GUI computer requirements[min] CPU:Dual-Core i3, 3GHz, RAM:4GB, OS:32 or 64 bit Windows 7 or later, VGA adapter: any.
[optimal] CPU:Quad-Core i7, 3.5GHz, RAM:16GB, OS:64 bit Windows 7 or later. VGA adapter: GeForce 8 and 100 series or higher.
Monitor resolution requirements[min] 1280 x 1080 px[recommended] 1920 x 1080 px
Communication interfaces[standard] Ethernet [optional] PROFIBUS, PROFINET or another industrial.
HousingCompact, rugged Al enclosure with enhanced protection from shock & vibration.
Dimensions7.1" x 5.7" (180 mm x 145 mm).
Length6” to 12” (153 mm to 305 mm), depending on configuration.
Weight2 - 5 kg, depending on configuration.