FloTron X HR - High-resolution Plasma Emission Monitoring System with Multi-channel Process Control

NEW FloTron™ X HR, High-resolution Plasma Emission Monitoring (PEM) System with Multi-channel Process Control

Download a PDF copy of a FloTron™ X HR brochure here

KEY FLOTRON™ X HR ADVANTAGES

  • High-resolution UV-VIS-nIR plasma OES and process control in one compact unit
  • Perfect plasma OES instrumentation for accurate plasma parameter identification and reliable determination of plasma characteristics
  • Perfect for monitoring and/or control where multiple plasma emissions are important
  • Vast application areas covering majority of plasma-based processes (e.g. vacuum, atmospheric, water-based, etc.)
  • Perfect for R&D and suitable for pilot as well as 24/7 mass production
  • High accuracy, excellent long-term process stability and reproducibility
  • A cost effective and easy to integrate solution/li>

KEY FLOTRON™ X HR FEATURES

  • 200-1100 nm UV-VIS-nIR CCD spectrometer Optical Input (OI)
  • Better than 0.5 nm optical resolution
  • HIPIMS plasma monitoring and reactive HIPIMS process control
  • 0-5V, 0-10V analog voltage and (optional) 4-20 mA current inputs
  • Built-in automated sensor and process calibration procedures
  • Advanced software features, such as Dual Sensor mode, externally synchronized sensor data output, simultaneous multi-spectra acquisition and display, etc.
  • 3 control algorithms: PID & PDF for closed-loop control and EPD for end-point detection
  • 5 multi-signal Actuator ports on standard FloTron™ X HR systems
  • 0-5V, 0-10V analog voltage outputs for high speed data acquisition (DAQ) of sensor signals or analysis by high frequency instrumentation (e.g. oscilloscope)
  • PROFIBUS & PROFINET optional industrial communication interfaces
  • FREE JAVA based FloTron™ Graphical User Interface and a smart FloTron™ Archive UI application for off-line review and organisation of logged data

IMPORTANT SPECIFICATIONS

SystemFloTron X HR
Output ports5(each provides power (+/- 15V or 24V), analog, digital and communication interfaces)
Input ports
Analog inputs (BNC)(0-5 or 0-10 or VDC, [optional] 4-20 mA DC)
Optical inputs (SMA 905)(UV-VIS-nIR spectrometer; or bespoke)
Optical inputs: spectral range and resolution200 - 1100 nm / < 0.5 nm
Remote control and status indication5 digital inputs/outputs (TTL)
Control algorithms 3 proprietary: PID, PDF, EPD.
External power requirement Power supply included. Input voltage: 90 – 264 VAC. Input frequency: 47 to 63 Hz.
GUI compatibilityWindows 7 or 8. Requires Java Runtime Environment 8 (JRE 8).
GUI computer requirements [min] CPU:Dual-Core i3, 3GHz, RAM:4GB, OS:32 or 64 bit Windows 7 or later, VGA adapter: any.
[optimal] CPU:Quad-Core i7, 3.5GHz, RAM:16GB, OS:64 bit Windows 7 or later. VGA adapter: GeForce 8 and 100 series or higher.
Monitor resolution requirements[min] 1280 x 1080 px.[recommended] 1920 x 1080 px.
Communication interfaces [standard] Ethernet [optional] PROFIBUS, PROFINET or another industrial.
HousingCompact, rugged Al enclosure.
Dimensions230 mm x 133 mm x 231 mm.
Weight4-6 kg , depending on configuration.