Planar targets

Planar targets

Nova Fabrica offers a full spectrum of planar targets. The most popular are listed below.

Metals

SilverAg
AluminumAl
GoldAu
CobaltCo
ChromiumCr
CopperCu
GermaniumGe
HafniumHf
IndiumIn
MagnesiumMg
MolybdenumMo
NiobiumNb
NickelNi
PlatinumPt
SiliconSi
TinSn
TantalumTa
TitaniumTi
VanadiumV
TungstenW
YttriumY
ZincZn
ZirconiumZr

Compounds

Aluminum OxideAl2O3
Aluminum-doped Zinc OxideAZO
Indium Zinc OxideIZO
Indium-Tin InSn
Indium Tin OxideITO
NiobiumSuboxide NbOx
Silicon-AluminumSiAl
Silicon OxideSiO2
Titanium Oxide TiOx
Zinc-AluminumZnAl