DC Power Supplies for Magnetron Sputter

Applications

  • Semiconductor wafer sputtering.
  • Oxide TFT LCD & Color filter.
  • OLED LTPS sputter metal & TCO deposition.
  • Thin film for solar cells.
  • Mobile phone cases.
  • ITO deposition for touch panels.
  • Automotive wheels and headlamps.
  • Ion nitriding.
  • BIPV, data storage, FCCL.
EnerStream

Parallel Operation

  • Maximum parallel operation of 12 each (Master 1 each + Slave 11 each)
  • Maximum output of 480 kW (EnerStream 60: maximum parallel operation of 8 each)