EnerPulse, pulse DC power supply for sputtering with advanced arc handling

Specifications

EnerPulse 5EnerPulse 10EnerPulse 10LVEnerPulse 10MEnerPulse 20
Input3Ø 208V/220V/380V3Ø 208V/220V/380V3Ø 380V3Ø 380V3Ø 220V/440V
Output800V, 6.25A800V, 12.5A650V, 15.4A800V, 12.5A650V, 30A
400V, 12.5A400V, 25A300V, 33.3A400V, 25A400V, 50A
Output powerPulsed DC 5kWPulsed DC 10kWPulsed DC 10kWPulsed DC 10kWPulsed DC 20kW
Output frequency20~150 kHz20~150 kHz20~150 kHz5~350 kHz20~100 kHz
Reverse timeDC mode, 1.0us~10us
Arc energyLess than 1mJ/kW
Interface RS-232/RS-485 (options: DeviceNet, ProfiBus)
Size (h×w×d),(mm)133×483×605133×483×605133×483×605133×483×605177×483×700
Weight (kg)29.529.54058.570.8
CoolingForced Air

Specifications

ItemsPulse 20 (ES20+PG20)Pulse 30 (ES30+PG30)Pulse 40 (2×ES20+PG40)
Input3Ø 220V/380V3Ø 380V/440V3Ø 220V/380V
Output800V, 25A800V, 37.5A800V, 50A
400V, 50A400V, 75A400V, 100A
Output powerPulsed DC 20kWPulsed DC 30kWPulsed DC 40kW
Output frequency40~100 kHz40~100 kHz40~80 kHz
Reverse timeDC mode, 1.0us~10usDC mode, 1.0us~5us
Arc energyLess than 1mJ/kW
Interface RS-232/RS-485 (options: DeviceNet, ProfiBus)
Size (h×w×d),(mm)133×483×605_PG133×483×605_PG133×483×605_PG
Weight (kg)9370.893
CoolingForced Air