EnerPulse Duo, bipolar pulse-DC power supply for dual magnetron sputtering

Specifications

EnerPulse 5 Duo EnerPulse 10 DuoDMS 20 (ES20+PG20Duo)DMS 30 (ES30+PG30Duo)
Input3Ø380V3Ø380V3Ø208V/220V/380V3Ø380V/440V
Output800V, 6.25A800V, 12.5A800V, 25A800V, 37.5A
400V, 12.5A400V, 25A400V, 50A400V, 75A
Output powerBipolar pulsed DC 5kWBipolar pulsed DC 10kWBipolar pulsed DC 20kWBipolar pulsed DC 30kW
Arc energyLess than 1mJ/kWLess than 3mJ/kW
InterfaceRS-232/RS-485 (options: DeviceNet, PROFIBUS)
Size (h×w×d)(mm)133×483×605133×483×605PGD-177×483×605PGD-177×483×605
Weight (kg)29.529.530.532
CoolingForced Air