Plasma Power supply Product Line-up

Application Model Waveform Mains input Output Marking
Dual DC SputterEnerStream 5DDC3Ø380V / 50-60Hz800V / 12.5A 2CH-
EnerStream10DDC3Ø380V / 50-60Hz800V / 25A 2CH-
Single DC SputterEnerStream10DC3Ø208V(34A) or 220V(32A) or 380V(19A) / 50-60Hz800V / 25A CE
EnerStream20DC3Ø208V(69A) or 220V(65A) or 380V(38A) / 50-60Hz800V / 50A CE
EnerStream30DC3Ø380V(56A) or 440V(49A) / 50-60Hz800V / 75A CE
EnerStream30BDC3Ø380V(56A) or 440V(49A) / 50-60Hz1000V / 60A-
EnerStream35DC3Ø380V(66A) or 440V(57A) / 50-60Hz1000V / 70A-
EnerStream60DC3Ø440V / 50-60Hz900V / 150A -
Single Pulse SputterEnerPulse 5Pulsed DC3Ø208V(17A) or 220V(16A) or 380V(9A) / 50-60Hz800V / 12.5A / 20-150kHzCE
EnerPulse 10Pulsed DC3Ø208V(17A) or 220V(32A) or 380V(19A) / 50-60Hz800V / 25A / 20-150kHz, 20-35CE
EnerPulse 10MPulsed DC3Ø380V(19A) / 50-60Hz800V / 25A / 20-350kHzCE
EnerPulse 20Pulsed DC3Ø440V / 50-60Hz650V / 50A / 40-100kHz-
Pulse 20kW (ES + PG)Pulsed DC3Ø220V(65A)/ 50-60Hz800V / 50A / 50-100kHz-
Pulse 30kW (ES + PG)Pulsed DC3Ø220V(98A) or 380V(56A) or 440V(49A) / 50-60Hz800V / 75A / 50-80kHz-
Pulse 40kW (ES + PG)Pulsed DC3Ø220V or 380V / 50-60Hz/ 50-60Hz800V / 100A / 50-80kHz-
EnerPulse 10 LVPulsed DC3Ø380V(19A) / 50-60Hz650V / 33.3A / 20-150kHz-
Dual Pulse SputterEnerPulse 5 DuoSymmetric Pulse3Ø380V(9A) / 50-60Hz800V / 12.5A / 20-50kHzCE
EnerPulse 10 DuoSymmetric Pulse3Ø380V(19A) / 50-60Hz800V / 25A / 20-50kHzCE
DMS 20kW (ES + PGD)Symmetric Pulse3Ø220V(65A) or 380V(38A) / 50-60Hz800V / 50A / 20-40kHz-
DMS 30kW (ES + PGD)Symmetric Pulse3Ø220V(65A) or 380V(38A) or 440V(49A) / 50-60Hz800V / 75A / 20-40kHz-
DMS 30kW(PE-CVD)Symmetric Pulse3Ø220V(65A) or 380V(38A) or 440V(49A) / 50-60Hz1000V / 60A / 20-40kHz-
DMS 60kW (ES + PGD)Symmetric Pulse3Ø220V(130A) or 380V(76A) or 440V(98A) / 50-60Hz800V / 150A / 20kHz-
DMS 60kW(PE-CVD)Symmetric Pulse3Ø220V(130A) or 380V(76A) or 440V(98A) / 50-60Hz1000V / 60A / 20kHz-
DC Bias, CleaningHercules 10DC3Ø220V(32A) or 380V(19A) / 50-60Hz1200V / 33.3ACE
Hercules 20DC3Ø220V(65A) or 380V(38A) / 50-60Hz1200V / 80ACE
Hercules 20SDC3Ø220V(65A) or 380V(38A) / 50-60Hz800V / 50ACE
Pulse Bias, CleaningPulse Bias 20kWPused DC3Ø220V(65A) or 380V(38A) / 50-60Hz800V / 50A / 50-100kHz-
Sputter, Pulse Bias, CleaningEnerPulse 5 HVPused DC3Ø220V(16A) or 380V(9A) / 50-60Hz1400V / 6.5A / 20-80kHz-
EnerPulse 10 HVPused DC3Ø220V(32A) or 380V(19A) / 50-60Hz1400V / 13A / 20-80kHz-
Pulse Bias, CleaningEnerPulse 5 BHVUni-polar3Ø220V(16A) or 380V(9A) / 50-60Hz1400V / 6.5A / 20-120kHz-
EnerPulse 10 BHVUni-polar3Ø208V(34A) or 220V(32A) or 380V(19A) / 50-60Hz1400V / 13A / 20-120kHz-
Sputter, Pulse Bias, CleaningEnerPulse 16 BHV(PE-CVD)Uni-polar380V(19A) / 50-60Hz900V / 30A / 20-120kHz-
Ion-BeamForte I-302(+)DC3Ø 220V(19A) / 380V(19A) 50-60Hz3000V / 2ACE
Ion-BombardmentForte I-302(-)DC3Ø 220V(19A) / 380V(19A) 50-60Hz3000V / 2ACE
Atm.(Torch)Genius J-1000Quasi Pulse1Ø220V / 50-60Hz1kW / 10kV / 2.5A / 40-60kHz-
Atm.(DBD)Genius 2Quasi Pulse3Ø220V(7A) / 50-60Hz10kVp(4kVp~) / 12kVp(5kVp~) / 15kVp(6kVp~) / 18kVp(7kVp~) / 20-60kHz-
Genius 10Quasi Pulse3Ø220V(32A) / 50-60Hz12kVp or 15kVp(2kVp~) / 20-60kHz-