Pulse DC Power Supplies for Magnetron Sputtering

Applications

  • Semiconductor wafer sputtering
  • Oxide TFT LCD & Color filter
  • OLED LTPS sputter metal & TCO deposition
  • Thin film for solar cells
  • Mobile phone cases
  • ITO deposition for touch panels
  • Automotive wheels and headlamps
  • Ion nitriding
  • BIPV, data storage, FCCL


EnerPulse

Benefits

  • Rapid increase of current induced by change in ionization voltage: 700V -> 1000V
  • Adjustable ionization voltage: 50 - 300V