FloTron, Economy Multi-channel Process Control and Plasma Monitoring (PEM) System
Download a PDF copy of a FloTron™ brochure here
5 KEY FLOTRON™ ADVANTAGES
- Applications: Reactive Magnetron Sputtering, Vacuum Arc, EB evaporation, IBS, PECVD & PEALD processes
- High accuracy and excellent long-term process stability and process-to-process (batch-to-batch) reproducibility
- A cost effective and easy to integrate solution
- Dramatic process improvements: higher deposition rate (e.g. 2-3 times), thin film properties (e.g. n, k), reduced arcing and number of micro & macro defects
- NEW Advanced software features, e.g. enhanced ‘Dual Sensor’ mode, process set-up automation, etc.
10 KEY FLOTRON™ FEATURES
- 3, 5 and 9 (multi-signal) Actuator ports on standard FloTron™ systems
- Single wavelength ‘PMT+filter’ type Optical Inputs (OIs)
- Multiple OIs for multi-zone process control on cathodes up to 4.0 m long
- Intelligent sensor technology for HIPIMS plasma monitoring and reactive gas control
- NEW 0-5V, 0-10V analog voltage and (optional) 4-20 mA current inputs
- NEW 3 control algorithms: PID & PDF for closed-loop control and EPD for end-point detection
- NEW Built-in automated sensor and process calibration procedures
- NEW 0-5V, 0-10V analog voltage outputs for high speed data acquisition (DAQ) of sensor signals or analysis by high frequency instrumentation (e.g. oscilloscope)
- PROFIBUS & PROFINET optional industrial communication interfaces
- FREE JAVA based FloTron™ Graphical User Interface and a smart FloTron™ Archive UI application for off-line review and organisation of logged process data
Specifications
| FloTron | 3 | 5 | 9 |
|---|---|---|---|
| Output ports | 3 | 5 | 9 |
| (each provides power (+/- 15V or 24V), analog, digital and communication interfaces) | |||
| Input ports | |||
| Analog inputs (BNC): 0-5 or 0-10 VDC; [optional] 4-20 mA DC | 4 | 4 | 2-4 |
| Optical inputs (SMA 905): PMT + filter | up to 1 | up to 3 | up to 5 |
| Optical inputs: spectral range and resolution | 200-900 nm / 10 nm | ||
| Remote control and status indication: digital inputs/outputs (TTL) | 3 | 5 | 9 |
| Control algorithms | 3 proprietary: PID, PDF, EPD. | ||
| External power requirement | Power supply included. Input voltage: 90 – 264 VAC. Input frequency: 47 to 63 Hz. | ||
| GUI compatibility | Windows 7 or 8. Requires Java Runtime Environment 8 (JRE 8). | ||
| GUI computer requirements | [min] CPU:Dual-Core i3, 3GHz, RAM:4GB, OS:32 or 64 bit Windows 7 or later, VGA adapter: any. | ||
| [optimal] CPU:Quad-Core i7, 3.5GHz, RAM:16GB, OS:64 bit Windows 7 or later. VGA adapter: GeForce 8 and 100 series or higher | |||
| Monitor resolution requirements | [min] 1280 x 1080 px [recommended] 1920 x 1080 px | ||
| Communication interfaces | [standard] Ethernet [optional] PROFIBUS, PROFINET or another industrial. | ||
| Housing | Compact, rugged Al enclosure with enhanced protection from shock & vibration. | ||
| Dimensions | 7.1" x 5.7" (180 mm x 145 mm) | ||
| Length | 6” to 12” (153 mm to 305 mm), depending on configuration. | ||
| Weight | 2 - 5 kg, depending on configuration. | ||