NEW FloTron™ X HR, High-resolution Plasma Emission Monitoring (PEM) System with Multi-channel Process Control
Download a PDF copy of a FloTron™ X HR brochure here
KEY FLOTRON™ X HR ADVANTAGES
- High-resolution UV-VIS-nIR plasma OES and process control in one compact unit
- Perfect plasma OES instrumentation for accurate plasma parameter identification and reliable determination of plasma characteristics
- Perfect for monitoring and/or control where multiple plasma emissions are important
- Vast application areas covering majority of plasma-based processes (e.g. vacuum, atmospheric, water-based, etc.)
- Perfect for R&D and suitable for pilot as well as 24/7 mass production
- High accuracy, excellent long-term process stability and reproducibility
- A cost effective and easy to integrate solution/li>
KEY FLOTRON™ X HR FEATURES
- 200-1100 nm UV-VIS-nIR CCD spectrometer Optical Input (OI)
- Better than 0.5 nm optical resolution
- HIPIMS plasma monitoring and reactive HIPIMS process control
- 0-5V, 0-10V analog voltage and (optional) 4-20 mA current inputs
- Built-in automated sensor and process calibration procedures
- Advanced software features, such as Dual Sensor mode, externally synchronized sensor data output, simultaneous multi-spectra acquisition and display, etc.
- 3 control algorithms: PID & PDF for closed-loop control and EPD for end-point detection
- 5 multi-signal Actuator ports on standard FloTron™ X HR systems
- 0-5V, 0-10V analog voltage outputs for high speed data acquisition (DAQ) of sensor signals or analysis by high frequency instrumentation (e.g. oscilloscope)
- PROFIBUS & PROFINET optional industrial communication interfaces
- FREE JAVA based FloTron™ Graphical User Interface and a smart FloTron™ Archive UI application for off-line review and organisation of logged data
IMPORTANT SPECIFICATIONS
| System | FloTron X HR |
|---|---|
| Output ports | 5(each provides power (+/- 15V or 24V), analog, digital and communication interfaces) |
| Input ports | |
| Analog inputs (BNC) | (0-5 or 0-10 or VDC, [optional] 4-20 mA DC) |
| Optical inputs (SMA 905) | (UV-VIS-nIR spectrometer; or bespoke) |
| Optical inputs: spectral range and resolution | 200 - 1100 nm / < 0.5 nm |
| Remote control and status indication | 5 digital inputs/outputs (TTL) |
| Control algorithms | 3 proprietary: PID, PDF, EPD. |
| External power requirement | Power supply included. Input voltage: 90 – 264 VAC. Input frequency: 47 to 63 Hz. |
| GUI compatibility | Windows 7 or 8. Requires Java Runtime Environment 8 (JRE 8). |
| GUI computer requirements | [min] CPU:Dual-Core i3, 3GHz, RAM:4GB, OS:32 or 64 bit Windows 7 or later, VGA adapter: any. |
| [optimal] CPU:Quad-Core i7, 3.5GHz, RAM:16GB, OS:64 bit Windows 7 or later. VGA adapter: GeForce 8 and 100 series or higher. | |
| Monitor resolution requirements | [min] 1280 x 1080 px.[recommended] 1920 x 1080 px. |
| Communication interfaces | [standard] Ethernet [optional] PROFIBUS, PROFINET or another industrial. |
| Housing | Compact, rugged Al enclosure. |
| Dimensions | 230 mm x 133 mm x 231 mm. |
| Weight | 4-6 kg , depending on configuration. |