Arc suppression |
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Less than 0.2 mJ/kW arc energy can be obtained to minimize damage caused by arcs during sputtering processes.
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Arc suppression waveforms |
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Test conditions: Al Target (5"×20"). | Process pressure: 3.5×10-2~1.0×10-4 Torr. |
Power supply: EnerStream20 (20kW DC). | Gas: Ar. |