Arc Suppression in EN Technologies plasma generators

Arc suppression

Less than 0.2 mJ/kW arc energy can be obtained to minimize damage caused by arcs during sputtering processes.

  • Adopt topology to minimize the capacitance and inductance of internal energy storage.
  • Apply reverse voltage within 200ns at arcing.
  • Current value drops to 0 within 2.5µs.
  • Minimize the inductance effect of output cable.

Arc suppression waveforms
Test conditions: Al Target (5"×20"). Process pressure: 3.5×10-2~1.0×10-4 Torr.
Power supply: EnerStream20 (20kW DC). Gas: Ar.