Applications Semiconductor wafer sputtering. Oxide TFT LCD & Color filter. OLED LTPS sputter metal & TCO deposition. Thin film for solar cells. Mobile phone cases. ITO deposition for touch panels. Automotive wheels and headlamps. Ion nitriding. BIPV, data storage, FCCL. Parallel Operation Maximum parallel operation of 12 each (Master 1 each + Slave 11 each) Maximum output of 480 kW (EnerStream 60: maximum parallel operation of 8 each)