DC & Pulse Power Supplies for Ion Cleaning & Bias

Applications

  • Cleaning and Biasing
  • Surface treatment

Enhanced Process Control

  • Wide operating range
  • Enhanced low voltage arc control

Specifications

Hercules 10Hercules 20Hercules 20S
Input3Ø 208V/220V/380V3Ø 208V/220V/380V3Ø 208V/380V
Output voltage1200V1200V800V
Output current33.3A80A50A
Output powerDC 10kWDC 20kWDC 20kW
Arc energyLess than 0.5mJ/kW
Interface RS-232/RS-485 (options: DeviceNet, PROFIBUS)
Size (h×w×d),(mm)133×483×605133×483×605133×483×605
Weight (kg)23.530.530.5
CoolingForced Air

EnerStream 30B EnerPulse 5BHV EnerPulse 10BHVEnerPulse 16BHV
Input3Ø 380V3Ø 208V/220V/380V3Ø 208V/220V/380V3Ø 380V
Output voltage1000V1400V1400V900V
Output current60A6.5A13A35A
Output powerDC 30kWPulsed DC 5kWPulsed DC 10kWPulsed DC 16kW
Arc energyLess than 0.5mJ/kW
InterfaceRS-232/RS-485 (options: DeviceNet, PROFIBUS)
Size (h×w×d),(mm)177×483×655133×483×605133×483×605177×483×605
Weight (kg)38.8292935
CoolingForced Air