Application | Model | Waveform | Mains input | Output | Marking |
---|---|---|---|---|---|
Dual DC Sputter | EnerStream 5D | DC | 3Ø380V / 50-60Hz | 800V / 12.5A 2CH | - |
EnerStream10D | DC | 3Ø380V / 50-60Hz | 800V / 25A 2CH | - | |
Single DC Sputter | EnerStream10 | DC | 3Ø208V(34A) or 220V(32A) or 380V(19A) / 50-60Hz | 800V / 25A | CE |
EnerStream20 | DC | 3Ø208V(69A) or 220V(65A) or 380V(38A) / 50-60Hz | 800V / 50A | CE | |
EnerStream30 | DC | 3Ø380V(56A) or 440V(49A) / 50-60Hz | 800V / 75A | CE | |
EnerStream30B | DC | 3Ø380V(56A) or 440V(49A) / 50-60Hz | 1000V / 60A | - | |
EnerStream35 | DC | 3Ø380V(66A) or 440V(57A) / 50-60Hz | 1000V / 70A | - | |
EnerStream60 | DC | 3Ø440V / 50-60Hz | 900V / 150A | - | |
Single Pulse Sputter | EnerPulse 5 | Pulsed DC | 3Ø208V(17A) or 220V(16A) or 380V(9A) / 50-60Hz | 800V / 12.5A / 20-150kHz | CE |
EnerPulse 10 | Pulsed DC | 3Ø208V(17A) or 220V(32A) or 380V(19A) / 50-60Hz | 800V / 25A / 20-150kHz, 20-35 | CE | |
EnerPulse 10M | Pulsed DC | 3Ø380V(19A) / 50-60Hz | 800V / 25A / 20-350kHz | CE | |
EnerPulse 20 | Pulsed DC | 3Ø440V / 50-60Hz | 650V / 50A / 40-100kHz | - | |
Pulse 20kW (ES + PG) | Pulsed DC | 3Ø220V(65A)/ 50-60Hz | 800V / 50A / 50-100kHz | - | |
Pulse 30kW (ES + PG) | Pulsed DC | 3Ø220V(98A) or 380V(56A) or 440V(49A) / 50-60Hz | 800V / 75A / 50-80kHz | - | |
Pulse 40kW (ES + PG) | Pulsed DC | 3Ø220V or 380V / 50-60Hz/ 50-60Hz | 800V / 100A / 50-80kHz | - | |
EnerPulse 10 LV | Pulsed DC | 3Ø380V(19A) / 50-60Hz | 650V / 33.3A / 20-150kHz | - | |
Dual Pulse Sputter | EnerPulse 5 Duo | Symmetric Pulse | 3Ø380V(9A) / 50-60Hz | 800V / 12.5A / 20-50kHz | CE |
EnerPulse 10 Duo | Symmetric Pulse | 3Ø380V(19A) / 50-60Hz | 800V / 25A / 20-50kHz | CE | |
DMS 20kW (ES + PGD) | Symmetric Pulse | 3Ø220V(65A) or 380V(38A) / 50-60Hz | 800V / 50A / 20-40kHz | - | |
DMS 30kW (ES + PGD) | Symmetric Pulse | 3Ø220V(65A) or 380V(38A) or 440V(49A) / 50-60Hz | 800V / 75A / 20-40kHz | - | |
DMS 30kW(PE-CVD) | Symmetric Pulse | 3Ø220V(65A) or 380V(38A) or 440V(49A) / 50-60Hz | 1000V / 60A / 20-40kHz | - | |
DMS 60kW (ES + PGD) | Symmetric Pulse | 3Ø220V(130A) or 380V(76A) or 440V(98A) / 50-60Hz | 800V / 150A / 20kHz | - | |
DMS 60kW(PE-CVD) | Symmetric Pulse | 3Ø220V(130A) or 380V(76A) or 440V(98A) / 50-60Hz | 1000V / 60A / 20kHz | - | |
DC Bias, Cleaning | Hercules 10 | DC | 3Ø220V(32A) or 380V(19A) / 50-60Hz | 1200V / 33.3A | CE |
Hercules 20 | DC | 3Ø220V(65A) or 380V(38A) / 50-60Hz | 1200V / 80A | CE | |
Hercules 20S | DC | 3Ø220V(65A) or 380V(38A) / 50-60Hz | 800V / 50A | CE | |
Pulse Bias, Cleaning | Pulse Bias 20kW | Pused DC | 3Ø220V(65A) or 380V(38A) / 50-60Hz | 800V / 50A / 50-100kHz | - |
Sputter, Pulse Bias, Cleaning | EnerPulse 5 HV | Pused DC | 3Ø220V(16A) or 380V(9A) / 50-60Hz | 1400V / 6.5A / 20-80kHz | - |
EnerPulse 10 HV | Pused DC | 3Ø220V(32A) or 380V(19A) / 50-60Hz | 1400V / 13A / 20-80kHz | - | |
Pulse Bias, Cleaning | EnerPulse 5 BHV | Uni-polar | 3Ø220V(16A) or 380V(9A) / 50-60Hz | 1400V / 6.5A / 20-120kHz | - |
EnerPulse 10 BHV | Uni-polar | 3Ø208V(34A) or 220V(32A) or 380V(19A) / 50-60Hz | 1400V / 13A / 20-120kHz | - | |
Sputter, Pulse Bias, Cleaning | EnerPulse 16 BHV(PE-CVD) | Uni-polar | 380V(19A) / 50-60Hz | 900V / 30A / 20-120kHz | - |
Ion-Beam | Forte I-302(+) | DC | 3Ø 220V(19A) / 380V(19A) 50-60Hz | 3000V / 2A | CE |
Ion-Bombardment | Forte I-302(-) | DC | 3Ø 220V(19A) / 380V(19A) 50-60Hz | 3000V / 2A | CE |
Atm.(Torch) | Genius J-1000 | Quasi Pulse | 1Ø220V / 50-60Hz | 1kW / 10kV / 2.5A / 40-60kHz | - |
Atm.(DBD) | Genius 2 | Quasi Pulse | 3Ø220V(7A) / 50-60Hz | 10kVp(4kVp~) / 12kVp(5kVp~) / 15kVp(6kVp~) / 18kVp(7kVp~) / 20-60kHz | - |
Genius 10 | Quasi Pulse | 3Ø220V(32A) / 50-60Hz | 12kVp or 15kVp(2kVp~) / 20-60kHz | - |