Applications Semiconductor wafer sputtering Oxide TFT LCD & Color filter OLED LTPS sputter metal & TCO deposition Thin film for solar cells Mobile phone cases ITO deposition for touch panels Automotive wheels and headlamps Ion nitriding BIPV, data storage, FCCL Benefits Rapid increase of current induced by change in ionization voltage: 700V -> 1000V Adjustable ionization voltage: 50 - 300V