Plasma-assisted CVD must favour sp3-bonded carbon while suppressing graphitic sp2 phases. Hydrogen assists by preferentially etching non-diamond carbon, but plasma chemistry is highly sensitive to power, pressure, temperature and gas composition. Without continuous diagnostics, species balance drifts degrade rate, film quality and run-to-run reproducibility.

Nova Fabrica’s Inteleg® 2B-PEM® provides broadband Optical Emission Spectroscopy (OES) to track key plasma species in real time, including C2, C3, CH, H2, and Balmer emissions (Hα, Hβ). These spectral fingerprints feed actionable diagnostics and drive fast closed-loop adjustments (e.g., gas flows, power set-points) via the Inteleg® Systems platform, locking the process to a stable working point for consistent output.

• Higher Yield with Fewer Aborts: Stabilised species balance improves diamond film uniformity and reduces rework.
• Round-the-Clock Control: 24/7 trending and closed-loop regulation of PECVD/PACVD parameters.
• Non-Intrusive and Low Maintenance: Viewport-based optics avoid plasma perturbation and probe wear.
• Fast Integration: Retrofit-friendly hardware and automation hooks shorten time-to-benefit.

• Technique/Method: Broadband Plasma Emission Monitoring (2B-PEM®)
• Spectral/Signal Coverage: Application-dependent; commonly tracks C2, C3, CH and Balmer Hα (656.3 nm), Hβ (486.1 nm)
• Temporal Performance: Continuous monitoring; integration time set for required SNR and response
• Operating Conditions: Non-intrusive optical coupling; suitable for typical PECVD/PACVD pressure and temperature ranges
• Interfaces/IO: Integrates with Inteleg® Systems for data acquisition and closed-loop control
• Form Factor/Integration: Retrofit to plasma CVD reactors via optical viewport or feed-through

Explore Inteleg® B2B e-commerce for configurations and pricing: https://inteleg.io/
Have an application in mind? Contact Nova Fabrica for a technical discussion or a demo: https://www.novafabrica.biz/contact/contact-us

• Compared with intrusive diagnostics (e.g., Langmuir probes, in-situ mass spectrometry), OES is simpler to operate and avoids plasma perturbation, enabling continuous control.
• Against single-channel or fixed-filter monitors, broadband OES captures multiple species simultaneously, improving robustness to recipe changes and drift.

Optical Emission Spectroscopy — https://www.novafabrica.biz/solutions/optical-emission-spectroscopy