Inteleg® S EI deposition rate monitor

INTELEG® S EI, EIES DEPOSITION RATE MEASUREMENT

Inteleg® S EI is an EIES-based long-lifetime deposition rate measurement and control system designed for high-vacuum-based evaporation processes, which require continuous, uninterrupted, precise and repeatable deposition rate measurement.
Inteleg® S EI enables uninterrupted long-term deposition rate measurement. The technology is mostly insensitive to environmental factors, highly stable, repeatable (<1%) and suitable for 24/7 operation.
Inteleg® S EI features a single detector measuring multiple materials. It can perform gas composition and process quality monitoring simultaneously and offers a long lifetime of the sensor.
Inteleg® S EI enables full automation of many evaporative film deposition processes, dramatically decreasing maintenance and operation costs. It also eliminates the need for multiple sensors and provides precise, accurate and repeatable rate measurements.
Inteleg® S EI can further advance environmentally friendly thin-film manufacturing processes. In particular, Inteleg® S EI can offer 25 to 50 % end-user cost savings for manual and automatic loading tools due to (a) lower maintenance cost, (b) less manufacturing downtime, (c) lower labour costs and (d) improved economy and efficiency.

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