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MASS FLOW CONTROLLERS
- Axetris proprietary platinum-based MEMS chip technology guarantees excellent accuracy and repeatability in combination with high speed and an extended dynamic range. The advantages of the platinum-based MEMS technology, combined with smart software processing and robust packaging, make Axetris Mass Flow Meters and Controllers an ideal choice for demanding OEM applications.
- The Axetris mass flow technology is used by many leading companies in the field of gas chromatography, leak testing, thermal analysis, mass spectroscopy, thin film deposition, plasma engineering and more.
- Axetris mass flow controllers are the ideal choice for applications requiring small size, high stability, fast response time and high turn-down ratio.
DETAILS
- Platinum-based MEMS technology
- High accuracy and repeatability
- Ultra-fast response time
- High dynamic range
- Full temperature compensation (0 to 50°C)
- Anemometric measurement principle
- Multi-gas/range capability
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