VACUUM LEAK DETECTION

TECHNOLOGY

SPOES (Self-plasma OES) leak detection system consists of
- a miniature plasma cell and
- an OES system.
SPOES is a UV-VIS-nIR-based OES technology that generates plasma and acquires real-time plasma emission spectra to detect leaks.
SPOES systems can be used in a multitude of leak detection scenarios, including
- Spray mode leak checking with Argon
- Vacuum "ready" state detection
- Online mode process leak tightness monitoring
- Online mode process quality monitoring
- Fault detection/recognition
Nova Fabrica's SPOES leak detection solution is compatible with all significant vacuum-based processes: IAD, ALD, CVD, PVD, Plasma etch, HIPping, Lyophilization (Freeze-drying), Deuterium-Tritium (DT) fusion, etc.

Nova Fabrica Inteleg® S IM SPOES leak detection systems are effective across a wide pressure range - from high vacuum (down to 7.5E-7 Torr) to process pressures (up to 0.75 Torr) - and offer real-time leak detection, vacuum quality monitoring, and fault detection.
They can be field deployed quickly, and their robustness and compact design ensure low maintenance and high reliability, even in demanding environments.

Mass-spectrometer-based Helium leak detection is widely recognised for its high sensitivity, safety, and real-time detection capabilities, making it a standard in various industries.
However, this method has notable drawbacks, including high costs, supply issues, complex equipment, and excessive sensitivity.
Additionally, environmental factors can impact measurement accuracy, prompting the need for alternative solutions.

Inteleg® S IM SPOES gas analysers offer a novel approach to real-time leak detection. It utilises optical emissions from a plasma cell and employs readily available Argon instead of expensive Helium for "spray" mode leak checking.
Inteleg® S IM operates at pressures 7.5E-7 to 0.75 Torr. The wide operating pressure range of SPOES makes detecting small and large leaks equally easy.
Inteleg® S IM may be used without pumping systems to detect leaks at high pressures.
Inteleg® S IM provides real-time leak detection, vacuum quality and condition monitoring, pump-down analysis, and fault detection for vacuum diagnostics.
Inteleg® S IM features a rugged and compact design and is low-maintenance.
Real-time process recognition, gas composition analysis, contamination, leak detection, end-point detection, and feedback control come embedded in every unit shipped.
Inteleg® S IM systems react instantly to minute composition changes and trace amounts of contamination in sensitive environments.